JPH0717376Y2 - L型真空バルブ - Google Patents
L型真空バルブInfo
- Publication number
- JPH0717376Y2 JPH0717376Y2 JP15316288U JP15316288U JPH0717376Y2 JP H0717376 Y2 JPH0717376 Y2 JP H0717376Y2 JP 15316288 U JP15316288 U JP 15316288U JP 15316288 U JP15316288 U JP 15316288U JP H0717376 Y2 JPH0717376 Y2 JP H0717376Y2
- Authority
- JP
- Japan
- Prior art keywords
- valve
- valve body
- opening
- type vacuum
- opened
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000009792 diffusion process Methods 0.000 description 4
- 239000000428 dust Substances 0.000 description 4
- 230000000630 rising effect Effects 0.000 description 3
- 239000003595 mist Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Self-Closing Valves And Venting Or Aerating Valves (AREA)
- Lift Valve (AREA)
- Check Valves (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15316288U JPH0717376Y2 (ja) | 1988-11-25 | 1988-11-25 | L型真空バルブ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15316288U JPH0717376Y2 (ja) | 1988-11-25 | 1988-11-25 | L型真空バルブ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0275136U JPH0275136U (en]) | 1990-06-08 |
JPH0717376Y2 true JPH0717376Y2 (ja) | 1995-04-26 |
Family
ID=31428753
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15316288U Expired - Lifetime JPH0717376Y2 (ja) | 1988-11-25 | 1988-11-25 | L型真空バルブ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0717376Y2 (en]) |
-
1988
- 1988-11-25 JP JP15316288U patent/JPH0717376Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0275136U (en]) | 1990-06-08 |
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